durusmail: mems-talk: Which metal is better for micro heater
Which metal is better for micro heater
2007-10-24
2007-10-24
Which metal is better for micro heater
Steven Yang
2007-10-24
Hi,all
To fabricate a micro heater with metal pattern, which metal is better,
Al, Pt, or Au? Better means using low power to achieve the same
temperature, lets say cost less than 10mW to get temperature around
100-200 degree with line width around 20um.

Thanks a lot!

Best regards,
Steven
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