Dear Yang, Many factors determine the final temperature. For examples, the substrate area materials' heat conductivity, and their heat capacity. Generally speaking, with the same heating power, smaller heating area can acheive higher local temperature. Best, Joseph -- ChungHao Chen (Joseph) Research Assistant Purdue University School of Electrical and Computer Engineering EE Building Box 114 465 Northwestern Avenue West Lafayette, IN 47907-2035 email: chen170@purdue.edu Quoting Steven Yang: > Hi,all > To fabricate a micro heater with metal pattern, which metal is better, > Al, Pt, or Au? Better means using low power to achieve the same > temperature, lets say cost less than 10mW to get temperature around > 100-200 degree with line width around 20um. >