durusmail: mems-talk: e-beaming high thermal conductivity non-metals!
e-beaming high thermal conductivity non-metals!
2007-11-01
2007-11-02
e-beaming high thermal conductivity non-metals!
Nitin Shukla
2007-11-01
Hi,
I want to deposit thin film of some nonmetal having high thermal conductivity
(>10 W/m-K) on top of my samples using e-beam PVD deposition. I tried Si (k~140
W/m-K) and Al2O3 (k~40 W/m-K) but it appears e-beam produces amorphous form of
these materials resulting in very low thermal conductivity of the deposited film
(~ 1-2 W/m-K).
I was wondering if anyone could suggest me some high thermal conductivity non-
metal that would maintain its high thermal conductivity in e-beam deposition.
Thanks,

  Nitin Shukla
  PhD Candidate
  Nanoscale Energy Transport Laboratory
  Department of Mechanical Engineering
  Virginia Tech
  Blacksburg, VA 24061
  Tel No: 540-231-5579
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