Mikael:

Maybe groups that provide the superior bonding like to be paid for their IP
investment. I alway maintain that deluxe cost 5 cents extra. Bob Henderson
----- Original Message -----
From: "Mikael Evander" 
To: 
Sent: Friday, November 02, 2007 7:58 AM
Subject: [mems-talk] proper glass-glass bonding


> Hello.
>
> I'm familiar with the "standard" glass-glass thermal fusion bonding method
where you wash your glass wafers, preferable surface activate them with
O2-plasma or such-like and thermo-cycle them in an oven a bit over Tg with
some pressure on the wafers. As far as I know most people using this get a
pretty low bonding efficiency, some voids and usually not the nice
"mirror-finish" on the glass that you usually see before you bond.
>
> I'm also aware that the companies doing glass-structuring and bonding
commercially must have, and have, much better bonding efficiencies and
incredably good looking bonding.
>
> I find it kind of surprising that whatever tips and tricks are being used
in getting at least a slightly better bond hasn't seeped out from the
industry. As far as I know at least ...
>
> Does anyone have any nice tips and tricks to share that would help me, and
hopefully lot of other people, to get more efficient bonding?