Using KOH etch I've made membranes of 10x10mm, 50um thin. I think you
should be able to produce your membranes.

Andrea


> Hi guys,
>
> I am trying to etch back a Si bulk with KOH to remain a ~10 um thick
> membrace wirh an area of 0.5mm x 0.5mm. I am concerned if such a thin
> membrance with such a big area is very fragile and if it is achievable.
> Someone told me such a thin Si layer is not flexible as a thin nitride
> layer. Is that true? I appreciate your advices.