Dear Giancarlo, Thanks a lot for your response. Can you please give me some more details about protek? How dose it work (like wax?) and where I can get it? Do you think wax is unable to resist KOH for long KOH etching? I need to have a long KOH etch for a 500 um Si bulk to remain a 10 um thinkness silicon membrance with 1mm by 1mm square. Best regards Lawrence CANAVESE GIANCARLO說: Dear Chin-Jen Chiang I think that protek is better than black wax for koh wet etching protection. Giancarlo Canavese