Hi

  Does any one know what could be the reasons for Plasma Flickering in Oxford
Plasmalab 80 Plus RIE system?. I am trying to etch polymers with SF6/O2/CHF3 gas
chemistry at 30mTorr, 200W. The recipe was working perfect earlier. Pure O2
plasma, even at 30mTorr, does not flicker at all. It starts flickering when you
mix O2 with SF6 and/or CHF3. What could be the reasons? I will appreciate your
feedback.

  With regards,


Pramod Gupta
21084 Red Fir Court
Cupertino, CA 95014
Phone: (408) 253-1646