Purvi

  Thanks for your response. How did you solve the plasma flickering problem?

  With regards,


Pramod Gupta
21084 Red Fir Court
Cupertino, CA 95014
Phone: (408) 253-1646

Purvi Kikani  wrote:
  Dear Sir
This has something to do with Flourine radicle. Because It happens with my
experiment when I do Teflon like deposition using PTFE gas.
As soon as I introduce PTFE gas inside reaction chamber, along with Nitrogen it
starts flickering.

The moment I switch off the PTFE gas flow, stable plasma is observed.

Regards,


Ms. Purvi Kikani
Facilitation Centre for Industrial Plasma Technologies
INSTITUTE FOR PLASMA RESEARCH
An Autonomous Institute of Dept. of Atomic Energy, Govt. of India
B-15-17/P, GIDC Sector 25, Gandhinagar - 382044 (Gujarat), India.
Ph: +91-79-23235025, 23235018 Fax: +91-79-23235024
Email: purvi@ipr.res.in, purvikikani@yahoo.com web: www.plasmaindia.com