I would like to get some information , from the user's point of view, about the MARCH CS-1701C RIE reactor. On paper, it looks better than the comparatively-priced Technics Micro-RIE. But I would like to hear your opinions about it. Any info on limitations you have found using either of these, or any other small RIE reactor in the same price range. By the way, thanks a lot again to all those folks who gave me hints and opinions about optical profilometers. Jose Roberto Senna LAS-INPE Brazil