Meifang

If you can bear the roughness you could use hard mask instead of lift-off.For
depositing Pt on PMMA substrate and for good adherence, you should do some
experiment ,as lower the temperature.

Good luck!

Sen

--附转发的邮件--From: meifang@mech.uwa.edu.auTo: mems-talk@memsnet.orgDate: Mon, 14
Jan 2008 12:19:24 +0900Subject: [mems-talk] How to deposite Pt electrods on PMMA
substrateHi all, I need to deposite some Pt electrods on PMMA substrate. For
PMMA can  not survive high temprature and dissolve in acetone, normal lift-off
is not suitable. Could anyone give some suggestion on the deposition  and lift-
off procedure?