durusmail: mems-talk: High Thickness of Aluminum on Silicon
High Thickness of Aluminum on Silicon
2008-01-21
2008-01-22
2008-01-22
Selective, clean PDMS etch
2008-01-23
2008-01-22
2008-01-21
High Thickness of Aluminum on Silicon
Andrea Mazzolari
2008-01-21
Yes, this is possible with screen printing. Maybe there are other methods,
i don't know.
At physics department of Ferrara University we have the possibility to
realize such depositions.
Best regards,
Andrea

> Hi All !
>
> For my process, I would like to know if there is an "easy" way to get
> a thick (300microns > t > 30 microns) layer of bare aluminum on a
> silicon wafer ?
> Evaporation and Sputtering are not suitable for this...
>
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