You can try high temp bonding of aluminum foil Shay -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of Jacques FATTACCIOLI Sent: Monday, January 21, 2008 3:30 AM To: General MEMS discussion Subject: [mems-talk] High Thickness of Aluminum on Silicon Hi All ! For my process, I would like to know if there is an "easy" way to get a thick (300microns > t > 30 microns) layer of bare aluminum on a silicon wafer ? Evaporation and Sputtering are not suitable for this...