durusmail: mems-talk: High Thickness of Aluminum on Silicon
High Thickness of Aluminum on Silicon
2008-01-21
2008-01-22
2008-01-22
Selective, clean PDMS etch
2008-01-23
2008-01-22
2008-01-21
High Thickness of Aluminum on Silicon
shay kaplan
2008-01-21
You can try high temp bonding of aluminum foil
Shay

-----Original Message-----
From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org]
On Behalf Of Jacques FATTACCIOLI
Sent: Monday, January 21, 2008 3:30 AM
To: General MEMS discussion
Subject: [mems-talk] High Thickness of Aluminum on Silicon

Hi All !

For my process, I would like to know if there is an "easy" way to get
a thick (300microns > t > 30 microns) layer of bare aluminum on a
silicon wafer ?
Evaporation and Sputtering are not suitable for this...

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