durusmail: mems-talk: Copper
Copper
2008-01-24
2008-01-24
2008-01-24
2008-01-24
Copper
Hakemi, Ghazal
2008-01-24
Dear all,

I have a chemistry-related question : does copper etch away in oxygen plasma?

Many thanks

Ghazal


Miss Ghazal Hakemi
PhD Student
Microsystems and Nanotechnology Centre (Building 70)
Cranfield University
MK43 0AL
tel. 01234 750111 x2583
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