Hello,

suppliers and manufacturers of SOG are probably the best ones to ask
such questions. Here is the address of our supplier (taken from an
old catalog, so maybe it has changed):

Filmtronics Inc.
Box 1521
Butler, Pennsylvania
16003 U.S.A.

Tel: (412) 352-3790
Fax:: -1772
EMail: 102432.3367@compuserve.com

Try to order a catalog. The one they sent us would certainly help to
answer your questions. The coating parameters depend on the kind of
SOG you are using. We are using our PL spinner for SOG coating.
Have fun. SOG is a really messy stuff.

Ralf.



> Hello,
>       I am trying  to fabricate a gold caantilever overhanging on a
> trench etched in Si. To make my cantilever stand erect I need to
> Planarise the surface. I plan to use thick Oxide to isolate my
> cantilever from the substrate hence using Oxide for planarisation is
> ruled out. I am thinking of using SOG for planarisation. My querries are
>       1. What should be the spin speed to coat SOG to a thickness of
>       2-3 microns?
>       2. Is it possible to use the same spinner which we use for
>       photolithography or a seperate spinner is a must?
>       3. What is the max. thickness we can get using SOG?
>
>
> regards
> nk choudhary
>
> ******************************************************************************
> Sqr Ldr N K Choudhary
> M.Tech (II).Electrical Engg.
> Microelectronics.
> IIT Powai.
> Bombay- 400 076.
> email:        
> ******************************************************************************
>

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