KOH will cause your SU-8 to peel off. - Kevin Nichols -----Original Message----- From: mems-talk-bounces@memsnet.org on behalf of jpt sharma Sent: Wed 1/30/2008 11:05 PM To: General MEMS discussion Subject: Re: [mems-talk] How to remove AZ photoresist in SU-8 microchannel? Hi KOH solution can remove AZ 5214 but I am not sure what it does with SU-8. Thanks