hi mems all,
   im working with this polymer su8 2005 to make waveguides of 7um but i
have a big problem, my waffer is made of glass and dimensions are 2.5cm
x 3.9 cm,
the recommende for a dispense of su8 is 1ml per inch so i dispense on
wafer 2.5ml of su8 at 1400rpms with minimal acceleration 100rpm/s but
when de procces ends the su8 is not uniform to the wafer surface (i can
see the su8 not fulfill the wafer) so i tried to dispense more su8 but
still have the same result, then i tried to make my wafer smaller an
then dispense 2ml of su8 at the same velocitie and the results were mor
convenient but still not the entire waffer fulfilled, i hope you can
undestand my question i know my english is bad :(, if you can help with
some tips for disposing su8-2005 in the wafer i will be always
gratefull, my best regards

Juan Jesus Sanchez Sanchez
C.I.C.E.S.E
Ensenada B.C. Mexico