Yes, web site www.yieldengineeing.com and look for the 1224P a piece of =
standard equipment designed for this.  The MEMS site does not like =
advertising so I will send more details of the unit to your email.  Bill =
Moffat

________________________________

From: mems-talk-bounces@memsnet.org on behalf of Xinyu Li
Sent: Mon 3/10/2008 5:51 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] trichlorosilane procedure


Hello friends in MEMS and microfluidics,

If I want to use a solution flow through microchannel to treat PDMS
surface by using trichlorosilane, anybody has some standard procedure
for this type of work?