durusmail: mems-talk: Pyrex isotropic etching
Pyrex isotropic etching
2008-04-04
2008-04-04
2008-04-07
2008-04-09
Pyrex isotropic etching
Yoshi Sakata
2008-04-04
Hi,

I'm looking for the isotropic etching method to cut grooves on a
pyrex wafer. The groove will have about 50um depth. I expect that the
bottom and side surface of the groove is smooth. Because I will put
the Au electrodes on those surface. Does someone have a good idea?

Thanks,

Yoshi
reply