durusmail: mems-talk: Silicon Carbide Bonding
Silicon Carbide Bonding
2008-04-04
Silicon Carbide Bonding
Ben Pecholt
2008-04-04
I am trying to bond a Silicon Carbide wafer (6H-SiC) in a prototype/test
packaging application (~500 C). Does anybody know of a bonding method that
will provide a strong mechanical bond? I have not heard of anybody using
anodic or fusion bonding for SiC. Thanks!

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Ben Pecholt
Graduate Student
Mechanical Engineering
Iowa State University
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