durusmail: mems-talk: n-type AlGaAs ohmic contacts
n-type AlGaAs ohmic contacts
2008-04-10
2008-04-10
n-type AlGaAs ohmic contacts
vaibhav mathur
2008-04-10
hi all,

can someone please suggest the optimum metal sequence and annealing recipe
to form ohmic contacts directly on n-type AlGaAs?

regards
Vaibhav Mathur
PHOTONICS CENTER
UMass,Lowell
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