I don't think DRIE is currently very common in the industry. When(if?) 3-D
Through silicon vias catches on, that will change though.

Robert

-----Original Message-----
From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org]
On Behalf Of Mikael Evander
Sent: Thursday, April 10, 2008 10:24 AM
To: General MEMS discussion
Subject: [mems-talk] DRIE in industry?

Hi.

Does anyone know how common DRIE really is in industry? It seem to
more or less be a fairly common tool in university labs, but is it
actually used in real facilities doing massfabrication as well? I've
always heard that it is slow/expensive and not suited for parallel
processing but the technique should have been refined pretty much
over the years, no?

kind regards

Mikael