Mikael,
Since we are purchasing a new DRIE tool to supplement our existing
capacity I can tell you the market is definitely growing, especially in
MEMS. Projected market forecasts for the rest of the industry (DRAM,
etc.) I have seen are for a little over $40M for 2008 with an increase
to around $96M by 2011.  When you see AMAT and Lam getting into the
business it means they both see growth potential that they want a piece
of.  We see more new applications constantly.

Doug Stewart
Fabrication Equipment Manager
Infotonics Technology Corporation
www.infotonics.org

-----Original Message-----
From: Mikael Evander [mailto:mikael.evander@elmat.lth.se]
Sent: Thursday, April 10, 2008 11:24 AM
To: General MEMS discussion
Subject: [mems-talk] DRIE in industry?

Hi.

Does anyone know how common DRIE really is in industry? It seem to
more or less be a fairly common tool in university labs, but is it
actually used in real facilities doing massfabrication as well? I've
always heard that it is slow/expensive and not suited for parallel
processing but the technique should have been refined pretty much
over the years, no?

kind regards

Mikael