Hi I think the PDMS is not sticking on SU8 - if you look on some paper from G Whiteside (the "father" of PDMS) and Duffy you can read is not sticking on some organic stuff. Usualy you need some oxygen bonds on the surface . Thoese are activated during Palsma Oxygen Good luck Petru On Tue, Mar 18, 2008 at 1:45 PM, Steven Yangwrote: > My microfluidic pattern is made of SU-8 on the Si substrate. I tried > to seal the pattern with a piece of PDMS. The PDMS is Oxygen plasma > treated at 20W for 20s to achieve a hydrophlic surface toward the > pattern. and SU-8 pattern also oxygen plasma treated under 100W for 1 > minute after its hardbake at 150C. After that, two sides was contact > and hot press at 100C for 2 hours in a vaccum oven. > > However, the bonding did not succeed. The problem probably comes from > that the PDMS did not show the adhesive property to SU-8 once they > were contacted. Actually, the PDMS is always show a "stick on" effect > when it is contacted to other materials, such as glass dish, or Si > substrate, even after the oxygen plasma treatment. But when it contact > to my SU-8 pattern surface, the effect did not show up. I read a lot > of work doing SU-8 and PDMS bonding with Oxygen treatment, but why does my > work turns out that the PDMS seems does not have the possibility to be > bonded on it?