Our research group at the University of Technology of Ilmenau, department of
Microsystems Technology, Mechatronics and Mechanics is for instance intensive
work on modelling, shaping and realisation for electrostatic x-y-precision
drive for large range of motion. In this connection we are looking for data and
process parameter about of photosensitive insulating materials.

Sincerely Detlef Riemer

Detlef.Riemer@Maschinenbau.TU-Ilmenau.DE