Here is a very recent article on DRIE and MEMS:

http://ap.pennnet.com/display_article/325749/36/ARTCL/none/n-
one/1/DRIE-for-MEMS-devices/

Mike



Quoting Robert Black :

> I don't think DRIE is currently very common in the industry. When(if?) 3-D
> Through silicon vias catches on, that will change though.
>
> Robert
>