Teimor, Give me time to research this more. I have lots of experience in plasma activation of Teflon but after a few weeks it returns to its original hydrophobicity. A colleague of mine says he has success with plasma activation flowed immediately with a chemical treatment that a) clings to the activated Teflon and b) presents a sticky molecule to the outside world for good adhesion I have other acquaintances who have asked the same question so I will research it some more. Bill Moffat Yield Engineering. ________________________________ From: mems-talk-bounces@memsnet.org on behalf of Teimour Maleki Sent: Sun 4/20/2008 8:34 PM To: 'General MEMS discussion' Subject: [mems-talk] Teflon Paterning Dear all, I am trying to pattern a thin film of Teflon on silicon substrate. I tried argon plasma activation, it seems fine, but I have problem with adhesion of Teflon to silicon. When I do post processing, it will pill of. Any comments on this will be appreciated very much. Thanks, -Teimour