Hi all,
i need to deposit about 150nm of silicon nitide on 4'' silicon wafers.
I don't have special requirements on thickness: i need to use this nitride
as masking layer against KOH etch.
I can accept high stress silicon nitride.
Wafers thickness is 500um or 900um. Wafer quantity is quite small: 100-150
wafers.

Any suggestion about someone who could provide this service ? I whould
prefere someone in the USA.

Many thanks,
Andrea