The profile is more close to the second one. but the upper part seems vertical, and the lower part close to substrate is inclined On Thu, Apr 24, 2008 at 9:13 PM, Gareth Jenkinswrote: > Ruilin, could you clarify what profile you are getting? > > Is is wider at the bottom, i.e. something like this: > ___ > I I > I I > I I > / \ > _____/ \_____ > > Or is it more like this: > _______ > \ / > \ / > I I > I I > ______I I________ > > I hope my attempt at ascii art works! -- Best Regards, Ruilin Zheng Address: Pen-Tung Sah MEMS Research Center, Xiamen University, Xiamen,361005, P.R.China