Hey there,

I am trained a chemist who originally knew absolutely nothing about
microfabrication.  I used a book that was pretty good for what you may
be looking for.  You can check it out and see if it is up your alley.

Marc J. Madou, "Fundamentals of Microfabrication:  The Science of
Miniaturization". 2002, CRC Press, 2nd Ed.  ISBN:  0849308267

Best,

-Richard

Richard B. Keithley
UNC Analytical Chemistry Graduate Student &
National Defense Science and Engineering Graduate Fellow
Wightman Research Group
Chapel Hill, NC 27599
919-962-1108

Jose Guevarra wrote:
> Hi,
>
>  I'm an undergrad whose getting serious about microfab.  I have two
> books (one is science and engineering of microelectronic fab by
> cambell)
> but I don't think either is geared toward entry level/ undergrad level
> students.  Can anyone recommend a good book with lot's of worked out
> examples and clear
> explanations of material concepts?