Hi. Do you want to make it porou/hydrophobic or just rough? There are techniques for making porous silicon, look for instance at: DOI: 10.1021/ac034425q When it comes to glass ,it depends on what kind of glass you're using, but I think I've seen somewhere that phosphoric acid can be used to increase the surface roughness and create a "matted" effect as seen on light-bulbs. Not much help but maybe you find something there :S cheers Mikael On 9 maj 2008, at 23.13, Zhao Lu wrote: > Hello, > > In my project, I need to increase the surface roughness of > silicon, glass > substrate or SU8. The surface roughness should be around 1 to 2um. Any > suggestion will be hightly appreciated.