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Young Modulus and Poisson Ratio of TiW
2008-05-14
Young Modulus and Poisson Ratio of TiW
Kim Anh Bui
2008-05-14
Dear all,

I measure the internal stress of TiW membrane by XRD and I need its poisson
ratio. I search some database on internet that around 0.28. Is it a good value?
And could you please give me the Young Modulus of TiW too.

We used TiW (10% . 90%) sputtering method. It is said that after sputtering, the
actual concentration of Ti in the membrane will be less than 10%. Then need I
measure the Young Modulus and the poisson ratio of the membrane after
deposition?

Thank you very much.
Anna.

Kim-Anh BUI-THI

Stagiaire de Thalès Recherche et Technologie
91767 - Palaiseau Cedex
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