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20um features using AZP4620
2008-06-03
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20um features using AZP4620
Haixin Zhu
2008-06-03
Dear all,

I am trying to produce 20um features using AZP4620, the thickness is
required to be 38um, I tried double coating/triple coating with various
spin speed and baking condition, and they did not work. Is there any one
having this experience and advise me on the right direction?

Appreciate the help

Michael

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