durusmail: mems-talk: Polymer residual about RIE etching of SiO2 by CHF3
Polymer residual about RIE etching of SiO2 by CHF3
2008-06-19
2008-06-20
2008-06-21
2008-06-23
2008-06-25
Polymer residual about RIE etching of SiO2 by CHF3
liuxf
2008-06-25
Thanks a lot, sir
well, do you have experience that whether the SPM wet clean process will etch Cr
layer?
thanks
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