durusmail: mems-talk: KOH etching of doped (P,As) Si wafers
KOH etching of doped (P,As) Si wafers
2008-07-04
2008-07-07
KOH etching of doped (P,As) Si wafers
P.E.M. Kuijpers
2008-07-04
Hi All,

Is the etch behaviour (in 33% KOH) of highly doped Si wafers the same as
un-doped Si wafers.


Thanks in advance.
Peter Kuijpers
MiPlaza
mailto:p.e.m.kuijpers@philips.com
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