Silicon wet etch can be affected by light - especially of it is not highly doped. The reaction need available electrons and light provides e/h pairs -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of Moshe Sent: Wednesday, July 16, 2008 11:11 AM To: mems-talk@memsnet.org Subject: Re: [mems-talk] TMAH solution photosensitivity But the main question remain - if any of TMAH solutions affected by light ? Just now I start to work with the TMAH and I also want to know the answer. Thank you