durusmail: mems-talk: Effect of EDP/KOH on PDMS and photopatternable silicone
Effect of EDP/KOH on PDMS and photopatternable silicone
2008-07-17
Effect of EDP/KOH on PDMS and photopatternable silicone
2008-07-19
Effect of EDP/KOH on PDMS andphotopatternable silicone
2008-07-21
Effect of EDP/KOH on PDMS and photopatternable silicone
Anurag Tripathi
2008-07-17
Hello,

I wanted to know if anyone of you has an experience with performing
EDP/KOH etch of a Si wafer with PDMS or photopatternable silicone WL
5150 patterned on the back side. Does the EDP/KOH etch damage the PDMS
or the photopatternable silicone?

Thank you very much,

Anurag Tripathi
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