as per my experince...

FR-RIE using SF6 + O2  (both 75sccm) at 200Watt, 200mtorr gives best
results... but depends on how much u want to etch.

all the best.

yusuf

On Mon, Jul 28, 2008 at 4:17 PM, anand anand  wrote:

> Hi,
>     I want to know that best gas or mixture of gases that can etch
> PDMS rapidly in order to design microfluidic channel using etcher asher.

--
Mohd.Yusuf.S.Mulla
Student-FH Jena, Germany.
Currently at :- Leuven, Belgium