Hi.

May I ask how did you put SU-8 on wafer? The best way is pray a thin layer
of SU-8(cover everywhere) first, then put curtain amount SU-8(1ml per inch
wafer) in the middle of wafer, then spin it. I do not know whether this will
help

Wei Cheng

On Wed, Aug 6, 2008 at 8:50 AM, jiang Liudi  wrote:

> Dear all,
>
> I was trying to obtain >100um thick of patterned SU8 2075. The used receipe
> is as follows:
>
> spin: 500rpm/10s+1700rpm/30sec
> soft bake: 65 C/5 mins +95 C/20min
> UV expose: 28 sec.
> PEB: 65 C/5 mins +95 C/10 min
> develop: 10 mins.
>
> all designed patterns are large ( all around 50-200um). However, using
> profiler, the  step of the developed patterns is only about 66 um thick.
>
> Could anyone kindly suggest the possible reasons for such thin resist?

--
Wei Cheng