durusmail: mems-talk: Su 8 thickness
Su 8 thickness
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Su 8 thickness
eowin rohan
2008-08-08
The best thing would be put the first layer, pre-bake and then  to pour the
thick layer of SU-8, I mean, just evaporate the solvent.

--- Den tors 2008-08-07 skrev jiang Liudi :
Från: jiang Liudi 
Ämne: Re: [mems-talk] Su 8 thickness
Till: "General MEMS discussion" 
Datum: torsdag 7 augusti 2008 09.22

Hi,

Thanks. I put SU8 down directly on pyrex wafer. could I ask when you spin thin
layer first, do you bake it before spin the second layer?

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