Hi Robert,

I guess the journal should be J. Micromechanical system. Those two
articles are really helpful.

Good luck!

2008/8/8, Robert Rehammar :
> Hi Peter,
>
> Two very nice review articles about different etch-rates are by
> Williams, K. R. J. of Micromechanincal processing 1996 vol 5 pp 256-269
> and Part II by the same person 2003 same journal vol 12 pp 761.
>
> I know there are recipes to etch some or all of these metals. Not sure
> about selectivity towards ITO, but maybe somewhere to start.
>
> Regrds,
> Robert
>
> ons 2008-08-06 klockan 08:06 +0200 skrev P.E.M. Kuijpers:
>> Dear all,
>>
>> Can one of these metals  Cr, Ti, Cu or Mo selectively be etched compared
>> to
>> ITO and what kind of etchant can be used for this
>>
>> Thanks
>> Peter

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Best regards,
Yours sincerely
Fei Wang
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