If you pull a vacuum in the micro channel, then pull in the vapor of heptadecafluoro silane. There are a variety of hepta deca's, get back to me for complete information. This should give you a contact angle of 130 degrees compared to Teflon's 120 degrees. Bill Moffat -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of Jian Wang Sent: Tuesday, August 19, 2008 7:10 AM To: 'General MEMS discussion' Subject: [mems-talk] Gas Phase Lubricant Dear all, I am working on PDMS microdevice. I need to lubricate the moving parts in the microchannels (200 um). Any suggestion about gas phase lubricant for microchannels? Appreciate your help. Jian