The answers are many, and would vary depending on new or used equipment
under consideration.

Consider some research on the Web at:

http://supersite.net/semiconductor/

This is a directory with many links to equipment manufactures.

Best wishes,
______________________________________________
Markus M. Van Loan (at home)
UCLA NRF Microlab
310-825-4593 http://nanolab.ucla.edu

-----Original Message-----
From: Xiaoning Jiang [mailto:xxj1@psu.edu]
Sent: Sunday, August 30, 1998 7:04 PM
To: MEMS@ISI.EDU
Subject: The cost of some clean room stuffs


Hi, MEMSers,

Is there anybody can give me some general idea of what cost
will be for the following items? (or get the manufacturer
info that we can contact):

1. (I) 300 sqare feet clean room (class 10,000) and (II) 900 sq. ft same
room
2. a wet bench (sink, hood, and DI rinser, and others)
3. a 8-10" spin coater for 4" wafer (up to 6-7000 rpm)

Thanks in advance!

Sincerely

Xiaoning Jiang