Thanks for the replies. Shay, you're assessment of potential cross-linking with the other wet processes is accurate. My observation of sample parts indicate that the re-exposed resist (again, this question was really about an alternate positive strip process involving re-exposing and re-developing used resist) does not dissolve off the surface, but rather, peels off in the developer. Furthermore, even unexposed samples that have gone through the permanganate and iodine baths also exhibit the same behavior: they appear to be soluble enough to peel off the wafer surface, but insoluble enough that sheets of the resist peel off the surface instead of normally dissolving. Shay Kaplanwrote: The action of the photo sensitive part of the resist is to change the hydrophobic/hydrophilic property of the Novolac. The pure Novolac, dissolves in high PH solutions. When the photoactive compound is added, the matrix becomes highly hydrophobic so water based developer has a hard time entering the matrix and the un-exposed resist has a very low removal rate in the developer. Once the PAC has carboxylic groups, it becomes hydrophilic so the developer has ha much easier access into the matrix. The fact that there is also an exothermic reaction between the base and the acid makes it even faster so the matrix removal rate is much higher. Regarding your strip post iodine or permanganate exposure - these might create a on soluble cap on top of the resist. Increasing OH concentration would help only if the other wet process do not cause some level of cross linking which I suspect both material may cause. Shay