The manufacturers of plasma etchers have
the information you seek.  Call them
up for applications information.  I
have a little pamphlet from March
Instruments that is quite useful
for my needs, but these
companies should be able to tell you
anything you  need to know.

best regards
mark


Mark W. Lund, PhD
Director             >> Soft X-ray Web page http://www.moxtek.com<<
MOXTEK, Inc.
452 West 1260 North
Orem UT 84057       801-225-0930        FAX 801-221-1121
lundm@xray.byu.edu

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