durusmail: mems-talk: How to get homogeneous surface by isotropic wet etch ?
How to get homogeneous surface by isotropic wet etch ?
2008-09-15
How to get homogeneous surface by isotropic wet etch ?
Moshe
2008-09-15
Hi

when I operate  isotropic wet  etch ( HNO3:HF - 98:2 ) for silicon piece the
thickness at the edge is thin from the center.

I am looking for solution to get homogeneous surface all over the piece.

Thank you, Moshe
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