Jason, I think that you are referring to RCA clean. The first solution in RCA clean is 1 part ammonia, 1 part hydrogen peroxide, 5 parts water. Do literature search on RCA clean, or Werner Kern (who developed RCA Clean here at Sarnoff). Let me know if I steered you in the right direction! Thanks, Mark Hammond Director, Silicon Technology Organization Sarnoff Corporation Jason Tauscher wrote: > > Someone mentioned a solution used to clean off Organic contaminants > called RCA Etch or something similar. It was developed in the 70's or > earlier, but I can't find any literature on it. I believe that it > contains H2O2 and H2SO4 but I don't know in what proportions. If anyone > can help me out, I'd appreciate it. > We're having some problems with "sticking" of our capacitive > accelerometers and want to eliminate the possibility of organic > contaminants. Any suggestions would be appreciated. > > Thanks. > > Jason Tauscher > > > Jason@sdi.wa.com >