For crystallographic etch simulation try VisualTAPAS,
http://www.fyslab.hut.fi/~mag/VisualTAPAS/Home.html

Roger Shile

-----Original Message-----
Dear all,

Is there any software for etching/development simulation? I found there
is
no such package in Ansys. Is there any commercial software?
Thank you for suggestion.

Best Regards
Jarod Vincent