Hello Everyone,

I will like to know how to check the completeness of Surface micromachining
process ?
When we remove sacrificial Oxide layer under the Thick polysilicon Structural
layer or from under the Metal bridges, we are not able to visually check whether
complete Sacrificial oxide has been removed or not. Is there any equipment
availabe or some test structures to qualify such process?

Pls let me know the details of such equipment manufacturer or any technical
literature available in this regard.

Thanks & regards,

Manoj Wadhwa