Ruilin, If it is high humidity a hydrophobic coating on the SU8 and the mask will fix it. Bill Moffat -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of Javier Crespo Sent: Thursday, October 23, 2008 7:09 AM To: General MEMS discussion Subject: Re: [mems-talk] SU-8 layer stick to mask after exposure Dear Ruilin, It could be a high humidity in the environment. Do you have the same environment conditions as before? Good luck,