Hi:

1. A 300 sqft clean room (class 100) will cost you $6300 and class 10000 I
guess will be half that amount or even lower.
2. A wet bench with these specs ~$8500 (I just got one)
3. A table top spin coater $4600

If you have any other question feel free to get in touch with me.
Regards
Jayant
**********************************************************
Jayant Neogi
Director: Research and Development
NORSAM Technologies (http://www.norsam.com)

Ph#  (503) 640-0586
Fax# (503) 640-8117
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----------
> From: Xiaoning Jiang 
> To: MEMS@ISI.EDU
> Subject: The cost of some clean room stuffs
> Date: Sunday, August 30, 1998 7:03 PM
>
> Hi, MEMSers,
>
> Is there anybody can give me some general idea of what cost
> will be for the following items? (or get the manufacturer
> info that we can contact):
>
> 1. (I) 300 sqare feet clean room (class 10,000) and (II) 900 sq. ft same
room
> 2. a wet bench (sink, hood, and DI rinser, and others)
> 3. a 8-10" spin coater for 4" wafer (up to 6-7000 rpm)
>
> Thanks in advance!
>
> Sincerely
>
> Xiaoning Jiang
>
>